The Villo OHT Overhead Track Cleaning System is designed for continuous dust removal from overhead hoist transport (OHT) tracks in semiconductor cleanrooms.
Using high-frequency ultrasonic vibration, the system dislodges fine particles from track surfaces without mechanical contact. Two independent negative-pressure channels collect detached particles in real time, helping reduce secondary contamination and track surface wear.
With its compact design and automated operation, the system can be integrated into existing OHT track systems, supporting continuous cleaning while reducing manual maintenance requirements.
| Item | Specification | |
| Model | VJS-SN-008LNZ-N1R | VJS-SN-008LNZ-N2R |
| Power Supply (V/Hz) | 220 / 50 | 220 / 50 |
| Power (kW) | 2 × 0.04 | 2 × 0.04 |
| Noise Level (dB(A)) | ≤75 | ≤75 |
| Nozzle Diameter (mm) | Φ360 | Φ360 |
| Filtration Precision (mesh) | Standard: 260 mesh (other mesh sizes optional) | Standard: 260 mesh (other mesh sizes optional) |
| Air Tightness | Withstands 300 Pa pressurization pressure and 100 Pa within 30 minutes | Withstands 300 Pa pressurization pressure and 100 Pa within 30 minutes |
| Oxygen Detection | √ | √ |
| Pressure Detection | √ | √ |
| Dimensions (mm) | 850 × 720 × 2010 | 850 × 720 × 2010 |
| Domestic Ultrasonic | √ | × |
| Imported Ultrasonic | × | √ |
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